Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Please use this identifier to cite or link to this item: https://doi.org/10.1109/TUFFC.2003.1197958

Title:	Piezoelectric ultrasonic micromotor with 1.5 mm diameter
Authors:	Dong, S. Lim, S.P. Lee, K.H. Zhang, J. Lim, L.C. Uchino, K.
Issue Date:	Apr-2003
Citation:	Dong, S., Lim, S.P., Lee, K.H., Zhang, J., Lim, L.C., Uchino, K. (2003-04). Piezoelectric ultrasonic micromotor with 1.5 mm diameter. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 50 (4) : 361-367. ScholarBank@NUS Repository. https://doi.org/10.1109/TUFFC.2003.1197958
Abstract:	A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.
Source Title:	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
URI:	http://scholarbank.nus.edu.sg/handle/10635/61113
ISSN:	08853010
DOI:	10.1109/TUFFC.2003.1197958
Appears in Collections:	Staff Publications

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