Please use this identifier to cite or link to this item: https://doi.org/10.1109/TUFFC.2003.1197958
Title: Piezoelectric ultrasonic micromotor with 1.5 mm diameter
Authors: Dong, S.
Lim, S.P. 
Lee, K.H.
Zhang, J.
Lim, L.C. 
Uchino, K.
Issue Date: Apr-2003
Source: Dong, S.,Lim, S.P.,Lee, K.H.,Zhang, J.,Lim, L.C.,Uchino, K. (2003-04). Piezoelectric ultrasonic micromotor with 1.5 mm diameter. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 50 (4) : 361-367. ScholarBank@NUS Repository. https://doi.org/10.1109/TUFFC.2003.1197958
Abstract: A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.
Source Title: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
URI: http://scholarbank.nus.edu.sg/handle/10635/61113
ISSN: 08853010
DOI: 10.1109/TUFFC.2003.1197958
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