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|Title:||An optically interrogated microgyroscope using an out-of-plane lamellar grating||Authors:||Zhou, G.
|Issue Date:||24-Sep-2009||Citation:||Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S. (2009-09-24). An optically interrogated microgyroscope using an out-of-plane lamellar grating. Sensors and Actuators, A: Physical 154 (2) : 269-274. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.03.031||Abstract:||This paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup. © 2009 Elsevier B.V. All rights reserved.||Source Title:||Sensors and Actuators, A: Physical||URI:||http://scholarbank.nus.edu.sg/handle/10635/59505||ISSN:||09244247||DOI:||10.1016/j.sna.2009.03.031|
|Appears in Collections:||Staff Publications|
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