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Title: An optically interrogated microgyroscope using an out-of-plane lamellar grating
Authors: Zhou, G. 
Cheo, K.K.L. 
Du, Y. 
Chau, F.S. 
Keywords: Lamellar gratings
Issue Date: 24-Sep-2009
Citation: Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S. (2009-09-24). An optically interrogated microgyroscope using an out-of-plane lamellar grating. Sensors and Actuators, A: Physical 154 (2) : 269-274. ScholarBank@NUS Repository.
Abstract: This paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup. © 2009 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
ISSN: 09244247
DOI: 10.1016/j.sna.2009.03.031
Appears in Collections:Staff Publications

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