Please use this identifier to cite or link to this item:
|Title:||An optically interrogated microgyroscope using an out-of-plane lamellar grating|
|Authors:||Zhou, G. |
|Citation:||Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S. (2009-09-24). An optically interrogated microgyroscope using an out-of-plane lamellar grating. Sensors and Actuators, A: Physical 154 (2) : 269-274. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.03.031|
|Abstract:||This paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup. © 2009 Elsevier B.V. All rights reserved.|
|Source Title:||Sensors and Actuators, A: Physical|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Nov 14, 2018
WEB OF SCIENCETM
checked on Nov 6, 2018
checked on Nov 3, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.