Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2009.03.031
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dc.titleAn optically interrogated microgyroscope using an out-of-plane lamellar grating
dc.contributor.authorZhou, G.
dc.contributor.authorCheo, K.K.L.
dc.contributor.authorDu, Y.
dc.contributor.authorChau, F.S.
dc.date.accessioned2014-06-17T06:12:14Z
dc.date.available2014-06-17T06:12:14Z
dc.date.issued2009-09-24
dc.identifier.citationZhou, G., Cheo, K.K.L., Du, Y., Chau, F.S. (2009-09-24). An optically interrogated microgyroscope using an out-of-plane lamellar grating. Sensors and Actuators, A: Physical 154 (2) : 269-274. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.03.031
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/59505
dc.description.abstractThis paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup. © 2009 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2009.03.031
dc.sourceScopus
dc.subjectLamellar gratings
dc.subjectMicrogyroscope
dc.subjectOptical
dc.subjectVibratory
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1016/j.sna.2009.03.031
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume154
dc.description.issue2
dc.description.page269-274
dc.description.codenSAAPE
dc.identifier.isiut000270643500012
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