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Title: Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon
Authors: Choi, W.K. 
Thong, J.T.L. 
Bai, Y. 
Newaskar, P.
Luo, P.
Issue Date: May-1999
Citation: Choi, W.K.,Thong, J.T.L.,Bai, Y.,Newaskar, P.,Luo, P. (1999-05). Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon. Bulletin of Materials Science 22 (3) : 615-621. ScholarBank@NUS Repository.
Abstract: An investigation on the effect of TMAH concentration on the etch of silicon, and the influence of etchant concentration, ambient temperature and wafer thermal history on the formation of pyramids at the surface of TMAH etched silicon has been carried out. From the results obtained from this study, we are able to explain the influence of TMAH concentration and ambient temperature on the silicon etch rate and the changes occurring at the silicon surface satisfactorily using the pH theory. However, the results from wafers with different thermal history seem to favour the defects theory. We suggest that in order to explain the etching mechanism of TMAH of silicon satisfactorily, a combination of pH and defects theories is necessary.
Source Title: Bulletin of Materials Science
ISSN: 02504707
Appears in Collections:Staff Publications

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