Please use this identifier to cite or link to this item:
https://doi.org/10.1109/TED.2013.2262135
| Title: | Germanium multiple-gate field-effect transistor with in situ boron-doped raised source/drain | Authors: | Liu, B. Zhan, C. Yang, Y. Cheng, R. Guo, P. Zhou, Q. Kong, E.Y.-J. Daval, N. Veytizou, C. Delprat, D. Nguyen, B.-Y. Yeo, Y.-C. |
Keywords: | Germanium (Ge) Germanium-on-Insulator (GeOI) in situ dope multiple-gate field-effect transistor (MuGFET) raised source/drain (RSD) |
Issue Date: | 2013 | Citation: | Liu, B., Zhan, C., Yang, Y., Cheng, R., Guo, P., Zhou, Q., Kong, E.Y.-J., Daval, N., Veytizou, C., Delprat, D., Nguyen, B.-Y., Yeo, Y.-C. (2013). Germanium multiple-gate field-effect transistor with in situ boron-doped raised source/drain. IEEE Transactions on Electron Devices 60 (7) : 2135-2141. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2013.2262135 | Abstract: | We report the first demonstration of a p-channel Ω-gate Germanium (Ge) multiple-gate field-effect transistor (MuGFET) on a Germanium-on-Insulator (GeOI) substrate with in situ Boron (B)-doped Ge (Ge:B) raised source/drain (RSD). Detailed process optimization on epitaxial growth of Ge on patterned GeOI samples is discussed. Process integration of Ge:B RSD into Ge MuGFETs using a CMOS compatible process flow is documented. Electrical characteristics of Ge MuGFETs with RSD are reported. © 1963-2012 IEEE. | Source Title: | IEEE Transactions on Electron Devices | URI: | http://scholarbank.nus.edu.sg/handle/10635/56135 | ISSN: | 00189383 | DOI: | 10.1109/TED.2013.2262135 |
| Appears in Collections: | Staff Publications |
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