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Title: A spectroscopic scanning electron microscope design
Authors: Khursheed, A. 
Osterberg, M. 
Keywords: Auger electrons
Backscattered electrons
Cathodoluminescence detectors
Energy-dispersive/wavelength dispersive x-ray spectrometer
Magnetic sector plates
Mixed immersion objective lenses
Scanning electron microscopy
Secondary electrons
Issue Date: Nov-2004
Citation: Khursheed, A.,Osterberg, M. (2004-11). A spectroscopic scanning electron microscope design. Scanning 26 (6) : 296-306. ScholarBank@NUS Repository.
Abstract: This paper describes a proposal to improve the design of scanning electron microscopes (SEMs). The design is based upon using an SEM column similar to the conventional one, magnetic sector plates and a mixed field immersion objective lens. The optical axis of the SEM column lies in the horizontal direction and the primary beam is turned through 90 degrees before it reaches the specimen. This arrangement allows for the efficient collection, detection and spectral analysis of the scattered electrons on a hemispherical surface that is located well away from the rest of the SEM column. The proposed SEM design can also be easily extended to incorporate time multiplexed columns and multi-column arrays.
Source Title: Scanning
ISSN: 01610457
Appears in Collections:Staff Publications

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