Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/54823
DC Field | Value | |
---|---|---|
dc.title | A spectroscopic scanning electron microscope design | |
dc.contributor.author | Khursheed, A. | |
dc.contributor.author | Osterberg, M. | |
dc.date.accessioned | 2014-06-17T02:35:56Z | |
dc.date.available | 2014-06-17T02:35:56Z | |
dc.date.issued | 2004-11 | |
dc.identifier.citation | Khursheed, A.,Osterberg, M. (2004-11). A spectroscopic scanning electron microscope design. Scanning 26 (6) : 296-306. ScholarBank@NUS Repository. | |
dc.identifier.issn | 01610457 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/54823 | |
dc.description.abstract | This paper describes a proposal to improve the design of scanning electron microscopes (SEMs). The design is based upon using an SEM column similar to the conventional one, magnetic sector plates and a mixed field immersion objective lens. The optical axis of the SEM column lies in the horizontal direction and the primary beam is turned through 90 degrees before it reaches the specimen. This arrangement allows for the efficient collection, detection and spectral analysis of the scattered electrons on a hemispherical surface that is located well away from the rest of the SEM column. The proposed SEM design can also be easily extended to incorporate time multiplexed columns and multi-column arrays. | |
dc.source | Scopus | |
dc.subject | Auger electrons | |
dc.subject | Backscattered electrons | |
dc.subject | Cathodoluminescence detectors | |
dc.subject | Energy-dispersive/wavelength dispersive x-ray spectrometer | |
dc.subject | Magnetic sector plates | |
dc.subject | Mixed immersion objective lenses | |
dc.subject | Scanning electron microscopy | |
dc.subject | Secondary electrons | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.sourcetitle | Scanning | |
dc.description.volume | 26 | |
dc.description.issue | 6 | |
dc.description.page | 296-306 | |
dc.description.coden | SCNND | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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