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Title: A high-resolution add-on in-lens attachment for scanning electron microscopes
Authors: Khursheed, A. 
Karuppiah, N. 
Koh, S.H.
Keywords: Immersion magnetic lenses
Permanent magnets
Scanning electron microscope
Issue Date: 2001
Citation: Khursheed, A.,Karuppiah, N.,Koh, S.H. (2001). A high-resolution add-on in-lens attachment for scanning electron microscopes. Scanning 23 (3) : 204-210. ScholarBank@NUS Repository.
Abstract: A compact add-on objective lens for the scanning electron microscope (SEM) has been designed and tested. The lens is < 35 mm high and can be fitted on to the specimen stage as an easy-to-use attachment. Initial results show that it typically improves the spatial resolution of the SEM by a factor of three. The add-on unit is based upon a permanent magnet immersion lens design. Apart from the extra attachment to the specimen stage, the SEM with the add-on lens functions in the normal way. The in-lens unit can comfortably accommodate specimen heights up to 10 mm. The new add-on lens unit opens up the possibility of operating existing SEMs in the high-resolution in-lens mode. By using a deflector at the top of the add-on lens unit, it can also operate as a quantitative multichannel voltage contrast spectrometer, capable of recording the energy spectrum of the emitted secondary electrons. Initial experiments confirm that a significant amount of voltage contrast can be obtained.
Source Title: Scanning
ISSN: 01610457
Appears in Collections:Staff Publications

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