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https://scholarbank.nus.edu.sg/handle/10635/54250
Title: | A high-resolution add-on in-lens attachment for scanning electron microscopes | Authors: | Khursheed, A. Karuppiah, N. Koh, S.H. |
Keywords: | Immersion magnetic lenses Permanent magnets Scanning electron microscope |
Issue Date: | 2001 | Citation: | Khursheed, A.,Karuppiah, N.,Koh, S.H. (2001). A high-resolution add-on in-lens attachment for scanning electron microscopes. Scanning 23 (3) : 204-210. ScholarBank@NUS Repository. | Abstract: | A compact add-on objective lens for the scanning electron microscope (SEM) has been designed and tested. The lens is < 35 mm high and can be fitted on to the specimen stage as an easy-to-use attachment. Initial results show that it typically improves the spatial resolution of the SEM by a factor of three. The add-on unit is based upon a permanent magnet immersion lens design. Apart from the extra attachment to the specimen stage, the SEM with the add-on lens functions in the normal way. The in-lens unit can comfortably accommodate specimen heights up to 10 mm. The new add-on lens unit opens up the possibility of operating existing SEMs in the high-resolution in-lens mode. By using a deflector at the top of the add-on lens unit, it can also operate as a quantitative multichannel voltage contrast spectrometer, capable of recording the energy spectrum of the emitted secondary electrons. Initial experiments confirm that a significant amount of voltage contrast can be obtained. | Source Title: | Scanning | URI: | http://scholarbank.nus.edu.sg/handle/10635/54250 | ISSN: | 01610457 |
Appears in Collections: | Staff Publications |
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