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https://doi.org/10.1109/OMEMS.2011.6031010
| Title: | Microtribometer based on a rotational grating displacement sensing mechanism | Authors: | Yu, H. Zhou, G. Chau, F.S. Sinha, S.K. Leong, Y.J. |
Keywords: | adhesion coefficient of friction grating MEMS microtribometer |
Issue Date: | 2011 | Citation: | Yu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031010 | Abstract: | A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured. © 2011 IEEE. | Source Title: | International Conference on Optical MEMS and Nanophotonics | URI: | http://scholarbank.nus.edu.sg/handle/10635/51624 | ISBN: | 9781457703362 | ISSN: | 21605033 | DOI: | 10.1109/OMEMS.2011.6031010 |
| Appears in Collections: | Staff Publications |
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