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|Title:||Microtribometer based on a rotational grating displacement sensing mechanism||Authors:||Yu, H.
coefficient of friction
|Issue Date:||2011||Citation:||Yu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031010||Abstract:||A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured. © 2011 IEEE.||Source Title:||International Conference on Optical MEMS and Nanophotonics||URI:||http://scholarbank.nus.edu.sg/handle/10635/51624||ISBN:||9781457703362||ISSN:||21605033||DOI:||10.1109/OMEMS.2011.6031010|
|Appears in Collections:||Staff Publications|
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