Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031010
Title: Microtribometer based on a rotational grating displacement sensing mechanism
Authors: Yu, H.
Zhou, G.
Chau, F.S.
Sinha, S.K. 
Leong, Y.J. 
Keywords: adhesion
coefficient of friction
grating
MEMS
microtribometer
Issue Date: 2011
Citation: Yu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031010
Abstract: A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured. © 2011 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/51624
ISBN: 9781457703362
ISSN: 21605033
DOI: 10.1109/OMEMS.2011.6031010
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