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|Title:||Microtribometer based on a rotational grating displacement sensing mechanism|
coefficient of friction
|Citation:||Yu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031010|
|Abstract:||A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured. © 2011 IEEE.|
|Source Title:||International Conference on Optical MEMS and Nanophotonics|
|Appears in Collections:||Staff Publications|
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