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Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031010
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dc.titleMicrotribometer based on a rotational grating displacement sensing mechanism
dc.contributor.authorYu, H.
dc.contributor.authorZhou, G.
dc.contributor.authorChau, F.S.
dc.contributor.authorSinha, S.K.
dc.contributor.authorLeong, Y.J.
dc.date.accessioned2014-04-24T10:17:05Z
dc.date.available2014-04-24T10:17:05Z
dc.date.issued2011
dc.identifier.citationYu, H.,Zhou, G.,Chau, F.S.,Sinha, S.K.,Leong, Y.J. (2011). Microtribometer based on a rotational grating displacement sensing mechanism. International Conference on Optical MEMS and Nanophotonics : 141-142. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2011.6031010" target="_blank">https://doi.org/10.1109/OMEMS.2011.6031010</a>
dc.identifier.isbn9781457703362
dc.identifier.issn21605033
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51624
dc.description.abstractA novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured. © 2011 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2011.6031010
dc.sourceScopus
dc.subjectadhesion
dc.subjectcoefficient of friction
dc.subjectgrating
dc.subjectMEMS
dc.subjectmicrotribometer
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/OMEMS.2011.6031010
dc.description.sourcetitleInternational Conference on Optical MEMS and Nanophotonics
dc.description.page141-142
dc.identifier.isiutNOT_IN_WOS
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