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Title: Automatic control and real-time monitoring of laser cleaning and laser ablation
Authors: Lu, Y.F. 
Meng, M.
Hong, M.H. 
Low, T.S. 
Chan, D.S.H. 
Issue Date: 1998
Citation: Lu, Y.F.,Meng, M.,Hong, M.H.,Low, T.S.,Chan, D.S.H. (1998). Automatic control and real-time monitoring of laser cleaning and laser ablation. Materials Research Society Symposium - Proceedings 526 : 149-156. ScholarBank@NUS Repository.
Abstract: Closed-loop control and real-time monitoring of pulsed excimer laser cleaning and ablation have been realized by software and hardware design and development. The audible acoustic wave generated during excimer laser surface cleaning and ablation has been used as the feedback signal for the automatic control system of laser-surface interaction. Man-machine interface for laser operation and acoustic monitoring has been developed with Lab VIEW 4.1 under Windows 95 environment. This system has been used to control and monitor laser cleaning and ablation processes in real-time and proven to successfully meet the requirements in our study. By database exchange, this automatic control system can also be applied to control drilling and materials removing.
Source Title: Materials Research Society Symposium - Proceedings
ISSN: 02729172
Appears in Collections:Staff Publications

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