Please use this identifier to cite or link to this item:
Title: Apparatus for CFC-free laser surface cleaning
Authors: LU, YONGFENG 
Issue Date: 18-Sep-2001
Citation: LU, YONGFENG,AOYAGI, YOSHINOBU (2001-09-18). Apparatus for CFC-free laser surface cleaning. ScholarBank@NUS Repository.
Abstract: An apparatus for dry cleaning a surface includes a laser generator, a laser beam homogenizer, an aperture and a lens that are controlled by a CPU. The laser is preferably a KrF excimer laser although any laser capable of generating a pulsed output in the ultraviolet spectrum may be used. The lens is preferably a plano-convex lens. Articles to be cleaned are placed on a conveyor that transports the article through the laser beam. The CPU can store parameters for optimizing removal of a particular contaminant. These parameters may include the frequency of the pulse beam generated by the laser, the shape of the aperture, the position of the lens is controlled by a stage, and the speed of the conveyor belt.
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
US6291796.PDF244.5 kBAdobe PDF



Page view(s)

checked on Oct 14, 2019


checked on Oct 14, 2019

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.