Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32599
Title: Apparatus for CFC-free laser surface cleaning
Authors: LU, YONGFENG 
AOYAGI, YOSHINOBU
Issue Date: 18-Sep-2001
Source: LU, YONGFENG,AOYAGI, YOSHINOBU (2001-09-18). Apparatus for CFC-free laser surface cleaning. ScholarBank@NUS Repository.
Abstract: An apparatus for dry cleaning a surface includes a laser generator, a laser beam homogenizer, an aperture and a lens that are controlled by a CPU. The laser is preferably a KrF excimer laser although any laser capable of generating a pulsed output in the ultraviolet spectrum may be used. The lens is preferably a plano-convex lens. Articles to be cleaned are placed on a conveyor that transports the article through the laser beam. The CPU can store parameters for optimizing removal of a particular contaminant. These parameters may include the frequency of the pulse beam generated by the laser, the shape of the aperture, the position of the lens is controlled by a stage, and the speed of the conveyor belt.
URI: http://scholarbank.nus.edu.sg/handle/10635/32599
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