Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/238261
Title: Passively Aligned Flip-chip Laser Diodes using Multi-axial Slide-stop Guided Design and Laser Assisted Bonding (LAB) on a CMOS-based Optical Interposer™
Authors: Baochang Xu 
Yu Zhang 
Chun Fei Siah 
Voon Yew Thean 
Yeow Kheng Lim 
Keywords: Silicon photonics
Advanced packaging
Issue Date: 18-Sep-2022
Publisher: Optica Publishing Group
Citation: Baochang Xu, Yu Zhang, Chun Fei Siah, Voon Yew Thean, Yeow Kheng Lim (2022-09-18). Passively Aligned Flip-chip Laser Diodes using Multi-axial Slide-stop Guided Design and Laser Assisted Bonding (LAB) on a CMOS-based Optical Interposer™. 2022 European Conference on Optical Communication (ECOC), Basel, Switzerland, 2022 : 1-4. ScholarBank@NUS Repository.
Rights: Attribution-NonCommercial-NoDerivatives 4.0 International
Abstract: The incorporation of rectangular slide-stop structures improve post-bond accuracy by 1.6X achieving a best-in-class relative axial offset of 0.13um. High-precision bonder with laser-assisted bonding capability enables heterogeneous integration of optical components with higher packing density due to a small heat-affected zone radius of 280um.
Source Title: 2022 European Conference on Optical Communication (ECOC), Basel, Switzerland, 2022
URI: https://scholarbank.nus.edu.sg/handle/10635/238261
ISBN: 978-1-957171-15-9
Rights: Attribution-NonCommercial-NoDerivatives 4.0 International
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