Please use this identifier to cite or link to this item: https://doi.org/10.1080/15599612.2022.2137608
Title: MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
Authors: Xinmiao Liu
Qifeng Qiao 
Bowei Dong
Weixin Liu 
Cheng Xu
Siyu Xu
Guangya ZHOU 
Issue Date: 5-Dec-2022
Publisher: Taylor & Francis
Citation: Xinmiao Liu, Qifeng Qiao, Bowei Dong, Weixin Liu, Cheng Xu, Siyu Xu, Guangya ZHOU (2022-12-05). MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications. International Journal of Optomechatronics 16 (1) : 42-57. ScholarBank@NUS Repository. https://doi.org/10.1080/15599612.2022.2137608
Source Title: International Journal of Optomechatronics
URI: https://scholarbank.nus.edu.sg/handle/10635/236341
ISSN: 1559-9612
DOI: 10.1080/15599612.2022.2137608
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