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Title: Design and fabrication of high-performance multimode interferometer in lithium niobate thin film
Authors: Chen, Guanyu 
da Ng, Jun 
Lin, Hong-Lin
Zhang, Gong 
Gong, Xiao 
Danner, Aaron J. 
Issue Date: 7-May-2021
Publisher: The Optical Society
Citation: Chen, Guanyu, da Ng, Jun, Lin, Hong-Lin, Zhang, Gong, Gong, Xiao, Danner, Aaron J. (2021-05-07). Design and fabrication of high-performance multimode interferometer in lithium niobate thin film. Optics Express 29 (10) : 15689-15698. ScholarBank@NUS Repository.
Rights: Attribution 4.0 International
Abstract: We propose and demonstrate a type of high-performance transverse magnetic (TM) multimode interferometer (MMI) in Z-cut thin film lithium niobate (TFLN). Both 1 × 2 and 4 × 4 MMI designs are demonstrated. Simulation results show that the insertion losses (ILs) are nominally about 0.157 and 0.297 dB for the 1 × 2 and 4 × 4 MMI, respectively, with wide fabrication tolerances. Based on the designed structure, the MMIs are fabricated using an argon based induced coupled plasma (ICP) etching method in Z-cut TFLN. The measured ILs are 0.268 and 0.63 dB for these two kinds of devices. The presented TM mode MMI featuring compact size and low loss can be used for both multifunctional devices and on-chip integrated circuits on a Z-cut TFLN platform. © 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Source Title: Optics Express
ISSN: 1094-4087
DOI: 10.1364/oe.419255
Rights: Attribution 4.0 International
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