Please use this identifier to cite or link to this item: https://doi.org/10.1364/OL.400132
Title: Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler
Authors: Qiao, Q. 
Yazici, M.S.
Dong, B. 
Liu, X. 
Lee, C. 
Zhou, G. 
Keywords: Science & Technology
Physical Sciences
Optics
SILICON
MODULATORS
DEVICES
Issue Date: 2020
Publisher: OPTICAL SOC AMER
Citation: Qiao, Q., Yazici, M.S., Dong, B., Liu, X., Lee, C., Zhou, G. (2020). Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler. OPTICS LETTERS 45 (19) : 5620-5623. ScholarBank@NUS Repository. https://doi.org/10.1364/OL.400132
Abstract: We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85-4.05 μm) using suspended waveguides with sub-wavelength cladding and a microelectro-mechanical systems (MEMS) tunable waveguide coupler. Leveraging the flip-chip bonding technology, a top wafer acting as the electrode is assembled above the silicon-on-insular wafer to enable the electrostatic actuation. Experimental characterizations for the functions of the proposed device include (1) an optical attenuator with 25 dB depth using DCvoltage actuation, (2) a 1 × 2 optical switch with response time of 8.9 μs and -3 dB bandwidth up to 127 kHz using AC voltage actuation, and (3) an on-chip integrated light chopper with the comparable performance of a commercial rotating disc light chopper.
Source Title: OPTICS LETTERS
URI: https://scholarbank.nus.edu.sg/handle/10635/188706
ISSN: 01469592
15394794
DOI: 10.1364/OL.400132
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