Please use this identifier to cite or link to this item: https://doi.org/10.1364/OL.400132
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dc.titleMultifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler
dc.contributor.authorQiao, Q.
dc.contributor.authorYazici, M.S.
dc.contributor.authorDong, B.
dc.contributor.authorLiu, X.
dc.contributor.authorLee, C.
dc.contributor.authorZhou, G.
dc.date.accessioned2021-04-07T10:13:20Z
dc.date.available2021-04-07T10:13:20Z
dc.date.issued2020
dc.identifier.citationQiao, Q., Yazici, M.S., Dong, B., Liu, X., Lee, C., Zhou, G. (2020). Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler. OPTICS LETTERS 45 (19) : 5620-5623. ScholarBank@NUS Repository. https://doi.org/10.1364/OL.400132
dc.identifier.issn01469592
dc.identifier.issn15394794
dc.identifier.urihttps://scholarbank.nus.edu.sg/handle/10635/188706
dc.description.abstractWe demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85-4.05 μm) using suspended waveguides with sub-wavelength cladding and a microelectro-mechanical systems (MEMS) tunable waveguide coupler. Leveraging the flip-chip bonding technology, a top wafer acting as the electrode is assembled above the silicon-on-insular wafer to enable the electrostatic actuation. Experimental characterizations for the functions of the proposed device include (1) an optical attenuator with 25 dB depth using DCvoltage actuation, (2) a 1 × 2 optical switch with response time of 8.9 μs and -3 dB bandwidth up to 127 kHz using AC voltage actuation, and (3) an on-chip integrated light chopper with the comparable performance of a commercial rotating disc light chopper.
dc.language.isoen
dc.publisherOPTICAL SOC AMER
dc.sourceElements
dc.subjectScience & Technology
dc.subjectPhysical Sciences
dc.subjectOptics
dc.subjectSILICON
dc.subjectMODULATORS
dc.subjectDEVICES
dc.typeArticle
dc.date.updated2021-04-07T05:11:38Z
dc.contributor.departmentDEPT OF ELECTRICAL & COMPUTER ENGG
dc.contributor.departmentDEPT OF MECHANICAL ENGINEERING
dc.description.doi10.1364/OL.400132
dc.description.sourcetitleOPTICS LETTERS
dc.description.volume45
dc.description.issue19
dc.description.page5620-5623
dc.published.statePublished
dc.description.redepositcompleted
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