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https://doi.org/10.1063/1.1757922
Title: | Groove Density Measurements for the VLS grating by Diffraction Method | Authors: | Hu, ZW Yu, XJ Chen, Q Liu, ZP Wang, QP |
Issue Date: | 2004 | Publisher: | AIP | Citation: | Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP (2004). Groove Density Measurements for the VLS grating by Diffraction Method. SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1757922 | Source Title: | SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation | URI: | https://scholarbank.nus.edu.sg/handle/10635/186560 | ISSN: | 0094243X | DOI: | 10.1063/1.1757922 |
Appears in Collections: | Staff Publications Elements |
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1.1757922.pdf | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in AIP Conference Proceedings 705, 823 (2004) and may be found at https://doi.org/10.1063/1.1757922 | 436.93 kB | Adobe PDF | OPEN | Published | View/Download |
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