Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1757922
Title: Groove Density Measurements for the VLS grating by Diffraction Method
Authors: Hu, ZW
Yu, XJ 
Chen, Q
Liu, ZP
Wang, QP
Issue Date: 2004
Publisher: AIP
Citation: Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP (2004). Groove Density Measurements for the VLS grating by Diffraction Method. SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1757922
Source Title: SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation
URI: https://scholarbank.nus.edu.sg/handle/10635/186560
ISSN: 0094243X
DOI: 10.1063/1.1757922
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1.1757922.pdfThis article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in AIP Conference Proceedings 705, 823 (2004) and may be found at https://doi.org/10.1063/1.1757922436.93 kBAdobe PDF

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