Groove Density Measurements for the VLS grating by Diffraction Method

Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1757922

DC Field	Value
dc.title	Groove Density Measurements for the VLS grating by Diffraction Method
dc.contributor.author	Hu, ZW
dc.contributor.author	Yu, XJ
dc.contributor.author	Chen, Q
dc.contributor.author	Liu, ZP
dc.contributor.author	Wang, QP
dc.date.accessioned	2021-02-22T01:11:21Z
dc.date.available	2021-02-22T01:11:21Z
dc.date.issued	2004
dc.identifier.citation	Hu, ZW, Yu, XJ, Chen, Q, Liu, ZP, Wang, QP (2004). Groove Density Measurements for the VLS grating by Diffraction Method. SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1757922
dc.identifier.issn	0094243X
dc.identifier.uri	https://scholarbank.nus.edu.sg/handle/10635/186560
dc.publisher	AIP
dc.source	Elements
dc.type	Conference Paper
dc.date.updated	2021-02-19T10:06:48Z
dc.contributor.department	SINGAPORE SYNCHROTRON LIGHT SOURCE
dc.description.doi	10.1063/1.1757922
dc.description.sourcetitle	SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation
dc.published.state	Published
Appears in Collections:	Staff Publications Elements

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