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https://doi.org/10.3390/mi8050160
Title: | A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter | Authors: | Qiao, Y Tao, J Chen, C.-H Qiu, J Tian, Y Hong, X Wu, J |
Keywords: | Bandpass filters Evanescent fields Infrared devices Methane MOEMS Optical resonators Optical waveguides Resonators Semiconducting silicon Semiconductor materials Silicon nitride Waveguides Gas detection Low-loss waveguides Methane concentrations Microring resonator Near infrared band Numerical calculation Photonics sensors Strip waveguides Waveguide filters |
Issue Date: | 2017 | Citation: | Qiao, Y, Tao, J, Chen, C.-H, Qiu, J, Tian, Y, Hong, X, Wu, J (2017). A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter. Micromachines 8 (5) : 160. ScholarBank@NUS Repository. https://doi.org/10.3390/mi8050160 | Rights: | Attribution 4.0 International | Abstract: | A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. © 2017 by the authors. | Source Title: | Micromachines | URI: | https://scholarbank.nus.edu.sg/handle/10635/178725 | ISSN: | 2072666X | DOI: | 10.3390/mi8050160 | Rights: | Attribution 4.0 International |
Appears in Collections: | Elements Staff Publications |
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