Please use this identifier to cite or link to this item: https://doi.org/10.3390/mi8050160
Title: A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter
Authors: Qiao, Y 
Tao, J
Chen, C.-H 
Qiu, J
Tian, Y
Hong, X
Wu, J
Keywords: Bandpass filters
Evanescent fields
Infrared devices
Methane
MOEMS
Optical resonators
Optical waveguides
Resonators
Semiconducting silicon
Semiconductor materials
Silicon nitride
Waveguides
Gas detection
Low-loss waveguides
Methane concentrations
Microring resonator
Near infrared band
Numerical calculation
Photonics sensors
Strip waveguides
Waveguide filters
Issue Date: 2017
Citation: Qiao, Y, Tao, J, Chen, C.-H, Qiu, J, Tian, Y, Hong, X, Wu, J (2017). A miniature on-chip methane sensor based on an ultra-low loss waveguide and a micro-ring resonator filter. Micromachines 8 (5) : 160. ScholarBank@NUS Repository. https://doi.org/10.3390/mi8050160
Rights: Attribution 4.0 International
Abstract: A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. © 2017 by the authors.
Source Title: Micromachines
URI: https://scholarbank.nus.edu.sg/handle/10635/178725
ISSN: 2072666X
DOI: 10.3390/mi8050160
Rights: Attribution 4.0 International
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