Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.cie.2015.04.008
| Title: | A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries | Authors: | Luo, Ming Yan, Heng-Chao Hu, Bin Zhou, Jun-Hong Pang, Chee Khiang |
Issue Date: | 2015 | Publisher: | Elsevier | Citation: | Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee Khiang (2015). A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers and Industrial Engineering 85 : 414-422. ScholarBank@NUS Repository. https://doi.org/10.1016/j.cie.2015.04.008 | Source Title: | Computers and Industrial Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/123380 | ISSN: | 03608352 | DOI: | 10.1016/j.cie.2015.04.008 |
| Appears in Collections: | Staff Publications |
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