Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.cie.2015.04.008
Title: A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries
Authors: Luo, Ming
Yan, Heng-Chao
Hu, Bin
Zhou, Jun-Hong
Pang, Chee Khiang 
Issue Date: 2015
Publisher: Elsevier
Source: Luo, Ming, Yan, Heng-Chao, Hu, Bin, Zhou, Jun-Hong, Pang, Chee Khiang (2015). A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers and Industrial Engineering 85 : 414-422. ScholarBank@NUS Repository. https://doi.org/10.1016/j.cie.2015.04.008
Source Title: Computers and Industrial Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/123380
ISSN: 03608352
DOI: 10.1016/j.cie.2015.04.008
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