Please use this identifier to cite or link to this item:
Title: The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon
Authors: Yan, L. 
Kong, L.B. 
Ong, C.K. 
Issue Date: Jul-2004
Citation: Yan, L., Kong, L.B., Ong, C.K. (2004-07). The effect of ultra-thin Al 2O 3 layers on the dielectric properties of LaAlO 3 thin film on silicon. Semiconductor Science and Technology 19 (7) : 935-938. ScholarBank@NUS Repository.
Abstract: High-k LaAlO 3 (LAO) thin films with and without Al 2O 3 buffer layers were deposited on n-type silicon substrates using pulsed laser deposition method. The dielectric constant of the LAO thin film increased from 5.2 to 23.1 as its thickness increased from 20 to 500 A. The effective dielectric constants of the LAO (120 Å)/Si and LAO(105 Å)/Al 2O 3(15 Å)/Si were 12.5 and 23.2, respectively. The flatband voltage of the LAO(105 Å)/ Al 2O 3(15 Å)/Si sample decreased from 2.0 V to 1.2 V after the sample was annealed for 5 min at 850°C in air atmosphere, while the dielectric constant value of the annealed sample did not change. It was found that a 15 Å thick Al 2O 3 buffer layer could enhance the dielectric properties of the LAO thin film, making it one of the good candidates for high-k materials.
Source Title: Semiconductor Science and Technology
ISSN: 02681242
DOI: 10.1088/0268-1242/19/7/027
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Jan 31, 2023


checked on Jan 24, 2023

Page view(s)

checked on Jan 26, 2023

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.