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https://doi.org/10.1016/j.jcrysgro.2004.12.020
Title: | Investigation of N incorporation in InGaAs and GaAs epilayers on GaAs using solid source molecular beam epitaxy | Authors: | Cheah, W.K. Fan, W.J. Yoon, S.F. Ng, T.K. Loke, W.K. Zhang, D.H. Mei, T. Liu, R. Wee, A.T.S. |
Keywords: | A1. High resolution X-ray diffraction A1. Photoluminescence A1. Secondary ion mass spectroscopy A3. Molecular beam epitaxy B1. GaAsN B1. InGaAsN |
Issue Date: | 1-Mar-2005 | Citation: | Cheah, W.K., Fan, W.J., Yoon, S.F., Ng, T.K., Loke, W.K., Zhang, D.H., Mei, T., Liu, R., Wee, A.T.S. (2005-03-01). Investigation of N incorporation in InGaAs and GaAs epilayers on GaAs using solid source molecular beam epitaxy. Journal of Crystal Growth 275 (3-4) : 440-447. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jcrysgro.2004.12.020 | Abstract: | The indium and nitrogen incorporation in InGaAsN/InGaAs/GaAsN grown on GaAs substrates is investigated by means of photoluminescence (PL) and secondary ion mass spectroscopy (SIMS) measurements. The elemental profile and concentration collected from the two methods are then used as the simulation parameters to fit the X-ray diffractometry (XRD) measurements. The simulations indicate that the epitaxial parameters in our growth of InGaAsN/InGaAs/GaAsN epilayers are consistent throughout the three methods of analysis. © 2004 Elsevier B.V. All rights reserved. | Source Title: | Journal of Crystal Growth | URI: | http://scholarbank.nus.edu.sg/handle/10635/115159 | ISSN: | 00220248 | DOI: | 10.1016/j.jcrysgro.2004.12.020 |
Appears in Collections: | Staff Publications |
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