Hydrogen 3D distribution in solids by ERDA imaging

Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(99)00525-X

Title:	Hydrogen 3D distribution in solids by ERDA imaging
Authors:	Yang, C. Teo, E.J. Osipowicz, T. Watt, F. Jamieson, D. Lee, K.K. Tomcik, B.
Issue Date:	2-Sep-1999
Citation:	Yang, C., Teo, E.J., Osipowicz, T., Watt, F., Jamieson, D., Lee, K.K., Tomcik, B. (1999-09-02). Hydrogen 3D distribution in solids by ERDA imaging. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 158 (1) : 706-712. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(99)00525-X
Abstract:	A method for quantitative analysis of hydrogen distribution in 3D has been developed using the elastic recoil detection analysis (ERDA) technique in conjunction with a nuclear microprobe. 2-3 MeV alpha particles, focused down to 2-5 μm, were applied at incident angles of 10-15° to the sample surface. Using an absorber placed in front of surface barrier (SB) detector in order to stop forward-scattered alpha particles, we have achieved a hydrogen detection limit of about 0.1 at.% and a depth resolution of about 80-100 nm. The technique was applied simultaneously with Rutherford backscattering spectrometry (RBS) to measure and image the hydrogen distribution in thin films and solid state bulk materials.
Source Title:	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI:	http://scholarbank.nus.edu.sg/handle/10635/115139
ISSN:	0168583X
DOI:	10.1016/S0168-583X(99)00525-X
Appears in Collections:	Staff Publications

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