Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation

Please use this identifier to cite or link to this item: https://doi.org/10.1088/1742-6596/34/1/003

Title:	Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation
Authors:	Moser, H.O. Jian, L.K. Casse, B.D.F. Heussler, S.P. Bahou, M. Cholewa, M. Kong, J.R. Saw, B.T. Mahmood, S.B. Yang, P.
Issue Date:	1-Apr-2006
Citation:	Moser, H.O., Jian, L.K., Casse, B.D.F., Heussler, S.P., Bahou, M., Cholewa, M., Kong, J.R., Saw, B.T., Mahmood, S.B., Yang, P. (2006-04-01). Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation. Journal of Physics: Conference Series 34 (1) : 15-21. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/003
Abstract:	SSLS' technology basis in micro/nanofabrication encompasses the full LIGA process in a class 1000 cleanroom. This technology is used for an R & D programme and for foundry-type work for commercial customers. R & D achievements include the development of the first electromagnetic metamaterials for the terahertz spectral range up to the near infrared. Complementing micro/nanofabrication, SSLS is exploiting its portfolio of synchrotron radiation methods for the characterisation of key properties of the micro/nanodevices as exemplified by the infrared spectroscopy of the THz electromagnetic metamaterials or of diffractive optical elements for Fourier transform spectroscopy. © 2006 IOP Publishing Ltd.
Source Title:	Journal of Physics: Conference Series
URI:	http://scholarbank.nus.edu.sg/handle/10635/113017
ISSN:	17426588
DOI:	10.1088/1742-6596/34/1/003
Appears in Collections:	Staff Publications

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