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Title: Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation
Authors: Moser, H.O. 
Jian, L.K. 
Casse, B.D.F. 
Heussler, S.P. 
Bahou, M. 
Cholewa, M. 
Kong, J.R. 
Saw, B.T. 
Mahmood, S.B. 
Yang, P. 
Issue Date: 1-Apr-2006
Citation: Moser, H.O., Jian, L.K., Casse, B.D.F., Heussler, S.P., Bahou, M., Cholewa, M., Kong, J.R., Saw, B.T., Mahmood, S.B., Yang, P. (2006-04-01). Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation. Journal of Physics: Conference Series 34 (1) : 15-21. ScholarBank@NUS Repository.
Abstract: SSLS' technology basis in micro/nanofabrication encompasses the full LIGA process in a class 1000 cleanroom. This technology is used for an R & D programme and for foundry-type work for commercial customers. R & D achievements include the development of the first electromagnetic metamaterials for the terahertz spectral range up to the near infrared. Complementing micro/nanofabrication, SSLS is exploiting its portfolio of synchrotron radiation methods for the characterisation of key properties of the micro/nanodevices as exemplified by the infrared spectroscopy of the THz electromagnetic metamaterials or of diffractive optical elements for Fourier transform spectroscopy. © 2006 IOP Publishing Ltd.
Source Title: Journal of Physics: Conference Series
ISSN: 17426588
DOI: 10.1088/1742-6596/34/1/003
Appears in Collections:Staff Publications

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