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https://doi.org/10.1088/1742-6596/34/1/003
| DC Field | Value | |
|---|---|---|
| dc.title | Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation | |
| dc.contributor.author | Moser, H.O. | |
| dc.contributor.author | Jian, L.K. | |
| dc.contributor.author | Casse, B.D.F. | |
| dc.contributor.author | Heussler, S.P. | |
| dc.contributor.author | Bahou, M. | |
| dc.contributor.author | Cholewa, M. | |
| dc.contributor.author | Kong, J.R. | |
| dc.contributor.author | Saw, B.T. | |
| dc.contributor.author | Mahmood, S.B. | |
| dc.contributor.author | Yang, P. | |
| dc.date.accessioned | 2014-11-28T08:43:17Z | |
| dc.date.available | 2014-11-28T08:43:17Z | |
| dc.date.issued | 2006-04-01 | |
| dc.identifier.citation | Moser, H.O., Jian, L.K., Casse, B.D.F., Heussler, S.P., Bahou, M., Cholewa, M., Kong, J.R., Saw, B.T., Mahmood, S.B., Yang, P. (2006-04-01). Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation. Journal of Physics: Conference Series 34 (1) : 15-21. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/003 | |
| dc.identifier.issn | 17426588 | |
| dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/113017 | |
| dc.description.abstract | SSLS' technology basis in micro/nanofabrication encompasses the full LIGA process in a class 1000 cleanroom. This technology is used for an R & D programme and for foundry-type work for commercial customers. R & D achievements include the development of the first electromagnetic metamaterials for the terahertz spectral range up to the near infrared. Complementing micro/nanofabrication, SSLS is exploiting its portfolio of synchrotron radiation methods for the characterisation of key properties of the micro/nanodevices as exemplified by the infrared spectroscopy of the THz electromagnetic metamaterials or of diffractive optical elements for Fourier transform spectroscopy. © 2006 IOP Publishing Ltd. | |
| dc.source | Scopus | |
| dc.type | Article | |
| dc.contributor.department | SINGAPORE SYNCHROTRON LIGHT SOURCE | |
| dc.description.doi | 10.1088/1742-6596/34/1/003 | |
| dc.description.sourcetitle | Journal of Physics: Conference Series | |
| dc.description.volume | 34 | |
| dc.description.issue | 1 | |
| dc.description.page | 15-21 | |
| dc.identifier.isiut | 000286667100003 | |
| Appears in Collections: | Staff Publications | |
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