Please use this identifier to cite or link to this item: https://doi.org/10.1088/1742-6596/34/1/003
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dc.titleFabrication and diagnostics of micro/nanodevices by means of synchrotron radiation
dc.contributor.authorMoser, H.O.
dc.contributor.authorJian, L.K.
dc.contributor.authorCasse, B.D.F.
dc.contributor.authorHeussler, S.P.
dc.contributor.authorBahou, M.
dc.contributor.authorCholewa, M.
dc.contributor.authorKong, J.R.
dc.contributor.authorSaw, B.T.
dc.contributor.authorMahmood, S.B.
dc.contributor.authorYang, P.
dc.date.accessioned2014-11-28T08:43:17Z
dc.date.available2014-11-28T08:43:17Z
dc.date.issued2006-04-01
dc.identifier.citationMoser, H.O., Jian, L.K., Casse, B.D.F., Heussler, S.P., Bahou, M., Cholewa, M., Kong, J.R., Saw, B.T., Mahmood, S.B., Yang, P. (2006-04-01). Fabrication and diagnostics of micro/nanodevices by means of synchrotron radiation. Journal of Physics: Conference Series 34 (1) : 15-21. ScholarBank@NUS Repository. https://doi.org/10.1088/1742-6596/34/1/003
dc.identifier.issn17426588
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/113017
dc.description.abstractSSLS' technology basis in micro/nanofabrication encompasses the full LIGA process in a class 1000 cleanroom. This technology is used for an R & D programme and for foundry-type work for commercial customers. R & D achievements include the development of the first electromagnetic metamaterials for the terahertz spectral range up to the near infrared. Complementing micro/nanofabrication, SSLS is exploiting its portfolio of synchrotron radiation methods for the characterisation of key properties of the micro/nanodevices as exemplified by the infrared spectroscopy of the THz electromagnetic metamaterials or of diffractive optical elements for Fourier transform spectroscopy. © 2006 IOP Publishing Ltd.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentSINGAPORE SYNCHROTRON LIGHT SOURCE
dc.description.doi10.1088/1742-6596/34/1/003
dc.description.sourcetitleJournal of Physics: Conference Series
dc.description.volume34
dc.description.issue1
dc.description.page15-21
dc.identifier.isiut000286667100003
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