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Title: Effect of bottom electrodes on dielectric properties of high frequency Ba0.5Sr0.5TiO3 parallel plate varactor
Authors: Sheng, S.
Zhang, X.-Y. 
Wang, P. 
Ong, C.K. 
Keywords: Barium strontium titanate
Dielectric properties
Microwave measurements
Parallel plate varactor
Pulse laser deposition
Thin films
X-ray diffraction
Issue Date: 1-Mar-2010
Citation: Sheng, S., Zhang, X.-Y., Wang, P., Ong, C.K. (2010-03-01). Effect of bottom electrodes on dielectric properties of high frequency Ba0.5Sr0.5TiO3 parallel plate varactor. Thin Solid Films 518 (10) : 2864-2866. ScholarBank@NUS Repository.
Abstract: Three types of Ba0.5Sr0.5TiO3 (BST) thin film parallel plate varactor with different bottom electrodes were fabricated. The bottom electrodes of three types of varactor were perovskite conducting oxide La0.7Sr0.3MnO3 (LSMO), Pt and Au, respectively. Dielectric properties of the BST thin films were characterized in the frequency range from 10 MHz to 15 GHz. The microstructure of the BST thin films was investigated by X-ray diffraction and scanning electron microscope. The microstructural analysis shows that the BST thin films grown on LSMO and Pt bottom electrodes are polycrystalline textured with columnar grains. Dielectric measurement indicates that the BST thin film grown on LSMO bottom electrode has a maximum dielectric constant and a little higher loss tangent. © 2009 Elsevier B.V. All rights reserved.
Source Title: Thin Solid Films
ISSN: 00406090
DOI: 10.1016/j.tsf.2009.09.063
Appears in Collections:Staff Publications

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