Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Subject: Temperature control

Type: Conference Paper

Results 1-11 of 11 (Search time: 0.005 seconds).

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	Issue Date	Title	Author(s)
1	2008	CD uniformity control via real-time control of photoresist properties	Chen, M.; Fu, J. ; Ho, W.K. ; Tay, A.
2	2005	In-situ fault detection of wafer warpage in lithography	Tay, A. ; Ho, W.K. ; Yap, C. ; Wei, C.; Tsai, K.-Y.
3	2005	In-situ measurement & control of photoresist development in microlithography	Kiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Zhou, Y.
4	2009	In-situ monitoring and control of photoresist parameters during thermal processing in the lithography sequence	Wu, X.; Yang, G.; Lim, E.-X.; Tay, A.
5	2008	In-situ real-time temperature control of baking systems in lithography	Wang, Y.; Chua, H.-T.; Tay, A.
6	2000	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks	Ho, W.K. ; Tay, A.
7	2000	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks	Ho, W.K. ; Tay, A.
8	2005	Real-time control of photoresist absorption coefficient uniformity	Tay, A. ; Ho, W.-K. ; Wu, X.; Tsai, K.-Y.
9	2005	Real-time control of photoresist development process	Tay, A. ; Ho, W.-K. ; Kiew, C.-M.; Zhou, Y.; Lee, J.H.
10	2007	Real-time spatial control of photoresist development rate	Tay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
11	2001	Spatially-programmable thermal processing module for 300 mm wafer processing	Tay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J.