Ee Beng, Arthur Tay

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Full Name

Ee Beng, Arthur Tay

Variants

Tay, Arthur
Tay, A.
Tay, E.B.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING
COLLEGE OF DESIGN AND ENGINEERING
DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Faculty

FAC OF ENGINEERING
COLLEGE OF DESIGN & ENG

eletaya@nus.edu.sg

Refined By:

Author: Tay, A.

Department: DEAN'S OFFICE (COLLEGE OF DESIGN & ENG)

Subject: Microlithography

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	Issue Date	Title	Author(s)
1	2005	In-situ measurement & control of photoresist development in microlithography	Kiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Zhou, Y.
2	2006	Robust real-time thin film thickness estimation	Kiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Lee, J.H.
3	2003	Warpage Detection during Baking of Semiconductor substrate in Microlithography	Ho, W.K. ; Tay, A. ; Lim, K.W. ; Zhou, Y.; Yang, K.