MIYAZAWA,TATSUO

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Full Name

MIYAZAWA,TATSUO

Variants

MIYAZAWA, TETSUO
Miyazawa, T.

Main Affiliation

MECHANICAL ENGINEERING

Faculty

COLLEGE OF DESIGN AND ENGINEERING

Refined By:

Department: MECHANICAL ENGINEERING

Subject: Laser lithography

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		Issue Date	Title	Author(s)
	1	Jan-1997	Post-cure shrinkage of photo-sensitive material used in laser lithography process	Fuh, J.Y.H. ; Chooo, Y.S. ; Lu, L. ; Nee, A.Y.C. ; Wong, Y.S. ; Wang, W.L. ; Miyazawa, T. ; Ho, S.H.