1. ScholarBank@NUS

MIYAZAWA,TATSUO

rp02244

Collaboration Map View Statistics Email Alert RSS Feed

Profile

Full Name
MIYAZAWA,TATSUO
Variants
MIYAZAWA, TETSUO
Miyazawa, T.
 
Main Affiliation
 
Faculty
 

Publications

Refined By:
Date Issued:  [1950 TO 1999]
Subject:  Laser lithography

Results 1-1 of 1 (Search time: 0.002 seconds).

Issue DateTitleAuthor(s)
1Jan-1997Post-cure shrinkage of photo-sensitive material used in laser lithography processFuh, J.Y.H. ; Chooo, Y.S. ; Lu, L. ; Nee, A.Y.C. ; Wong, Y.S. ; Wang, W.L. ; Miyazawa, T. ; Ho, S.H.