Ionscan: Scanning and control software for proton beam writing

Abstract

The proton beam writing technique relies on a precise beam scanning and control system that offers a simple yet flexible interface for the fabrication and design of microstructures. At the Centre for Ion Beam Applications, National University of Singapore, we have developed a suite of programs, collectively known as Ionscan, that cater for the specific needs of proton beam writing. The new version of Ionscan is developed using the Microsoft Visual C++. NET development environment in conjunction with a National Instruments analog output card and NI-DAQ drivers. With the benefit of the experience gained in proton beam writing over the years, numerous enhancements and new features have been added to the scanning software since the first version of the program that was developed using LabVIEW [A.A. Bettiol, J.A. van Khan, T.C. Sum, F. Watt, Nucl. Instr. and Meth. B 181 (2001) 49]. These include the ability to perform combined stage and magnetic (or electrostatic) scanning, which is particularly useful for the fabrication of long waveguides and microfluidic channels over lengths of up to 2.5 cm. Other enhancements include the addition of the Ionutils program which gives the user the ability to design basic structures using an ASCII file format that was developed. This format contains basic information on the shape to be irradiated including the way in which it is scanned. © 2005 Elsevier B.V. All rights reserved.