Alignment tolerances of MEMS Alvarez lenses

Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMN.2013.6659043

Title:	Alignment tolerances of MEMS Alvarez lenses
Authors:	Zou, Y. Zhou, G. Du, Y. Chau, F.S.
Issue Date:	2013
Citation:	Zou, Y., Zhou, G., Du, Y., Chau, F.S. (2013). Alignment tolerances of MEMS Alvarez lenses. International Conference on Optical MEMS and Nanophotonics : 29-30. ScholarBank@NUS Repository. https://doi.org/10.1109/OMN.2013.6659043
Abstract:	Characteristics and alignment tolerances of a MEMS Alvarez lens are studied. Results show that the lens can adjust its focal length substantially with small lateral displacements of its constituent elements along the x axis. Meanwhile, it is also revealed that the lens performance degrades with the increasing displacements. The lens is most sensitive to the misalignment along the y direction. Normalized RMS spot radius (NRSR) rises from 1 to 10 with a misalignment of 0.1 mm in this direction. In addition, a tilt of 1 degree about the x, y or z axis leads to a NRSR change from 0.96 to 1.02, 0.92, and 1.28, respectively. © 2013 IEEE.
Source Title:	International Conference on Optical MEMS and Nanophotonics
URI:	http://scholarbank.nus.edu.sg/handle/10635/85872
ISBN:	9781479915125
ISSN:	21605033
DOI:	10.1109/OMN.2013.6659043
Appears in Collections:	Staff Publications

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