Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMN.2013.6659043
Title: Alignment tolerances of MEMS Alvarez lenses
Authors: Zou, Y.
Zhou, G. 
Du, Y. 
Chau, F.S. 
Issue Date: 2013
Citation: Zou, Y.,Zhou, G.,Du, Y.,Chau, F.S. (2013). Alignment tolerances of MEMS Alvarez lenses. International Conference on Optical MEMS and Nanophotonics : 29-30. ScholarBank@NUS Repository. https://doi.org/10.1109/OMN.2013.6659043
Abstract: Characteristics and alignment tolerances of a MEMS Alvarez lens are studied. Results show that the lens can adjust its focal length substantially with small lateral displacements of its constituent elements along the x axis. Meanwhile, it is also revealed that the lens performance degrades with the increasing displacements. The lens is most sensitive to the misalignment along the y direction. Normalized RMS spot radius (NRSR) rises from 1 to 10 with a misalignment of 0.1 mm in this direction. In addition, a tilt of 1 degree about the x, y or z axis leads to a NRSR change from 0.96 to 1.02, 0.92, and 1.28, respectively. © 2013 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/85872
ISBN: 9781479915125
ISSN: 21605033
DOI: 10.1109/OMN.2013.6659043
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

25
checked on Oct 26, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.