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|Title:||Alignment tolerances of MEMS Alvarez lenses|
|Source:||Zou, Y.,Zhou, G.,Du, Y.,Chau, F.S. (2013). Alignment tolerances of MEMS Alvarez lenses. International Conference on Optical MEMS and Nanophotonics : 29-30. ScholarBank@NUS Repository. https://doi.org/10.1109/OMN.2013.6659043|
|Abstract:||Characteristics and alignment tolerances of a MEMS Alvarez lens are studied. Results show that the lens can adjust its focal length substantially with small lateral displacements of its constituent elements along the x axis. Meanwhile, it is also revealed that the lens performance degrades with the increasing displacements. The lens is most sensitive to the misalignment along the y direction. Normalized RMS spot radius (NRSR) rises from 1 to 10 with a misalignment of 0.1 mm in this direction. In addition, a tilt of 1 degree about the x, y or z axis leads to a NRSR change from 0.96 to 1.02, 0.92, and 1.28, respectively. © 2013 IEEE.|
|Source Title:||International Conference on Optical MEMS and Nanophotonics|
|Appears in Collections:||Staff Publications|
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