Experimental verification of phononic crystal slab based silicon microresonators

Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMN.2013.6659094

Title:	Experimental verification of phononic crystal slab based silicon microresonators
Authors:	Wang, N. Tang, M. Hsiao, F.-L. Ho, C.P. Palaniapan, M. Kwong, D.-L. Lee, C.
Issue Date:	2013
Citation:	Wang, N.,Tang, M.,Hsiao, F.-L.,Ho, C.P.,Palaniapan, M.,Kwong, D.-L.,Lee, C. (2013). Experimental verification of phononic crystal slab based silicon microresonators. International Conference on Optical MEMS and Nanophotonics : 131-132. ScholarBank@NUS Repository. https://doi.org/10.1109/OMN.2013.6659094
Abstract:	This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region. © 2013 IEEE.
Source Title:	International Conference on Optical MEMS and Nanophotonics
URI:	http://scholarbank.nus.edu.sg/handle/10635/83714
ISBN:	9781479915125
ISSN:	21605033
DOI:	10.1109/OMN.2013.6659094
Appears in Collections:	Staff Publications

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