Please use this identifier to cite or link to this item:
|Title:||Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications||Authors:||Koh, K.H.
|Keywords:||Microelectromechanical systems (MEMS)
|Issue Date:||Sep-2012||Citation:||Koh, K.H., Kobayashi, T., Lee, C. (2012-09). Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications. Sensors and Actuators, A: Physical 184 : 149-159. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2012.06.018||Abstract:||A silicon micromirror driven by piezoelectric Pb(Zr,Ti)O 3 cantilever actuator has been demonstrated for 2-D scanning applications. Two different PZT actuator designs have been fabricated and characterized to investigate the effects of the dimensions and number of S-shaped PZT cantilever actuator folds on the 2-D scanning performances of the micromirror. Three modes of operation have also been investigated for both devices. Device A, which is driven by single S-shaped PZT cantilever actuator, performs better in both dc and ac laser scanning compared to device B, which is driven by double S-shaped PZT actuator. At 10 V dc, static ODA of 4.6°and 3.3°are obtained for devices A and B respectively. In the ac actuation regime, device A achieved ±9.0°at resonant frequency of 27 Hz, 1 V pp while device B achieved ±7.2°at 20 Hz, 1 V pp for bending mode. In torsional mode, dynamic ODA peaks of ±1.8°and ±1.2°are observed at 70 Hz and 156 Hz for devices A and B respectively. Lissajous scan patterns for both devices have been successfully demonstrated by superimposing two ac sinusoidal signals of different frequencies into one signal to be used to actuate the mirror. © 2012 Elsevier B.V. All rights reserved.||Source Title:||Sensors and Actuators, A: Physical||URI:||http://scholarbank.nus.edu.sg/handle/10635/82577||ISSN:||09244247||DOI:||10.1016/j.sna.2012.06.018|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 8, 2021
WEB OF SCIENCETM
checked on Jun 1, 2021
checked on Jun 9, 2021
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.