Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2012.06.018
Title: Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
Authors: Koh, K.H.
Kobayashi, T.
Lee, C. 
Keywords: Microelectromechanical systems (MEMS)
Micromirror
Optical MEMS
Piezoelectric actuator
PZT
Issue Date: Sep-2012
Citation: Koh, K.H., Kobayashi, T., Lee, C. (2012-09). Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications. Sensors and Actuators, A: Physical 184 : 149-159. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2012.06.018
Abstract: A silicon micromirror driven by piezoelectric Pb(Zr,Ti)O 3 cantilever actuator has been demonstrated for 2-D scanning applications. Two different PZT actuator designs have been fabricated and characterized to investigate the effects of the dimensions and number of S-shaped PZT cantilever actuator folds on the 2-D scanning performances of the micromirror. Three modes of operation have also been investigated for both devices. Device A, which is driven by single S-shaped PZT cantilever actuator, performs better in both dc and ac laser scanning compared to device B, which is driven by double S-shaped PZT actuator. At 10 V dc, static ODA of 4.6°and 3.3°are obtained for devices A and B respectively. In the ac actuation regime, device A achieved ±9.0°at resonant frequency of 27 Hz, 1 V pp while device B achieved ±7.2°at 20 Hz, 1 V pp for bending mode. In torsional mode, dynamic ODA peaks of ±1.8°and ±1.2°are observed at 70 Hz and 156 Hz for devices A and B respectively. Lissajous scan patterns for both devices have been successfully demonstrated by superimposing two ac sinusoidal signals of different frequencies into one signal to be used to actuate the mirror. © 2012 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/82577
ISSN: 09244247
DOI: 10.1016/j.sna.2012.06.018
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