Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/73717
Title: Optical interferometric inspection of surface contour of MEMS-components
Authors: Tay, C.J. 
Wang, S.H. 
Quan, C. 
Keywords: MEMS
Micro-accelerometer
Micro-components
Micromirror
Optical interferometry
Single fiber-end surface
Issue Date: 2006
Citation: Tay, C.J.,Wang, S.H.,Quan, C. (2006). Optical interferometric inspection of surface contour of MEMS-components. Key Engineering Materials 326-328 I : 47-50. ScholarBank@NUS Repository.
Abstract: In this paper, we describe an optical interferometer applied to 3D inspection of micro-components. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phase-shifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.
Source Title: Key Engineering Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/73717
ISSN: 10139826
Appears in Collections:Staff Publications

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