Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/73717
| Title: | Optical interferometric inspection of surface contour of MEMS-components | Authors: | Tay, C.J. Wang, S.H. Quan, C. |
Keywords: | MEMS Micro-accelerometer Micro-components Micromirror Optical interferometry Single fiber-end surface |
Issue Date: | 2006 | Citation: | Tay, C.J.,Wang, S.H.,Quan, C. (2006). Optical interferometric inspection of surface contour of MEMS-components. Key Engineering Materials 326-328 I : 47-50. ScholarBank@NUS Repository. | Abstract: | In this paper, we describe an optical interferometer applied to 3D inspection of micro-components. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phase-shifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components. | Source Title: | Key Engineering Materials | URI: | http://scholarbank.nus.edu.sg/handle/10635/73717 | ISSN: | 10139826 |
| Appears in Collections: | Staff Publications |
Show full item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.