Please use this identifier to cite or link to this item:
Title: Optical interferometric inspection of surface contour of MEMS-components
Authors: Tay, C.J. 
Wang, S.H. 
Quan, C. 
Keywords: MEMS
Optical interferometry
Single fiber-end surface
Issue Date: 2006
Citation: Tay, C.J.,Wang, S.H.,Quan, C. (2006). Optical interferometric inspection of surface contour of MEMS-components. Key Engineering Materials 326-328 I : 47-50. ScholarBank@NUS Repository.
Abstract: In this paper, we describe an optical interferometer applied to 3D inspection of micro-components. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phase-shifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.
Source Title: Key Engineering Materials
ISSN: 10139826
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on Oct 13, 2019

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.