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|Title:||Optical interferometric inspection of surface contour of MEMS-components|
|Authors:||Tay, C.J. |
Single fiber-end surface
|Source:||Tay, C.J.,Wang, S.H.,Quan, C. (2006). Optical interferometric inspection of surface contour of MEMS-components. Key Engineering Materials 326-328 I : 47-50. ScholarBank@NUS Repository.|
|Abstract:||In this paper, we describe an optical interferometer applied to 3D inspection of micro-components. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phase-shifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.|
|Source Title:||Key Engineering Materials|
|Appears in Collections:||Staff Publications|
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