Please use this identifier to cite or link to this item:
Title: A novel optical lamellar grating out-of-plane microgyroscope
Authors: Zhou, G. 
Cheo, K.K.L. 
Du, Y. 
Fook, S.C. 
Issue Date: 2008
Citation: Zhou, G.,Cheo, K.K.L.,Du, Y.,Fook, S.C. (2008). A novel optical lamellar grating out-of-plane microgyroscope. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 864-867. ScholarBank@NUS Repository.
Abstract: This paper demonstrates the realization of a novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The device was fabricated based on the SOI-MUMPS process. The gyroscope demonstrated a sensitivity of 17.8μV/(°/s) and linearity error of less than 0.6%. The results have great potential to be improved through the use of more stable lasers, vacuum operation and better fabrication control. ©2008 IEEE.
Source Title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN: 9781424417933
ISSN: 10846999
DOI: 10.1109/MEMSYS.2008.4443793
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Jan 12, 2020

Page view(s)

checked on Dec 29, 2019

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.