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|Title:||A novel optical lamellar grating out-of-plane microgyroscope|
|Authors:||Zhou, G. |
|Source:||Zhou, G.,Cheo, K.K.L.,Du, Y.,Fook, S.C. (2008). A novel optical lamellar grating out-of-plane microgyroscope. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 864-867. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2008.4443793|
|Abstract:||This paper demonstrates the realization of a novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The device was fabricated based on the SOI-MUMPS process. The gyroscope demonstrated a sensitivity of 17.8μV/(°/s) and linearity error of less than 0.6%. The results have great potential to be improved through the use of more stable lasers, vacuum operation and better fabrication control. ©2008 IEEE.|
|Source Title:||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Appears in Collections:||Staff Publications|
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