Please use this identifier to cite or link to this item: https://doi.org/10.1109/MEMSYS.2008.4443793
Title: A novel optical lamellar grating out-of-plane microgyroscope
Authors: Zhou, G. 
Cheo, K.K.L. 
Du, Y. 
Fook, S.C. 
Issue Date: 2008
Source: Zhou, G.,Cheo, K.K.L.,Du, Y.,Fook, S.C. (2008). A novel optical lamellar grating out-of-plane microgyroscope. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 864-867. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2008.4443793
Abstract: This paper demonstrates the realization of a novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The device was fabricated based on the SOI-MUMPS process. The gyroscope demonstrated a sensitivity of 17.8μV/(°/s) and linearity error of less than 0.6%. The results have great potential to be improved through the use of more stable lasers, vacuum operation and better fabrication control. ©2008 IEEE.
Source Title: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
URI: http://scholarbank.nus.edu.sg/handle/10635/73072
ISBN: 9781424417933
ISSN: 10846999
DOI: 10.1109/MEMSYS.2008.4443793
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