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https://scholarbank.nus.edu.sg/handle/10635/72967
| Title: | Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces | Authors: | Song, W.D. Lu, Y.F. Hong, M.H. Chong, T.C. Low, T.S. |
Issue Date: | 1996 | Citation: | Song, W.D.,Lu, Y.F.,Hong, M.H.,Chong, T.C.,Low, T.S. (1996). Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces. LEOS Summer Topical Meeting : 2pp-. ScholarBank@NUS Repository. | Abstract: | In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. This paper discusses the theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces. | Source Title: | LEOS Summer Topical Meeting | URI: | http://scholarbank.nus.edu.sg/handle/10635/72967 | ISSN: | 10994742 |
| Appears in Collections: | Staff Publications |
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