Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/72519
DC FieldValue
dc.titleCharging control using pulsed scanning electron microscopy
dc.contributor.authorWong, W.K.
dc.contributor.authorPhang, J.C.H.
dc.contributor.authorThong, J.T.L.
dc.date.accessioned2014-06-19T05:08:58Z
dc.date.available2014-06-19T05:08:58Z
dc.date.issued1995
dc.identifier.citationWong, W.K.,Phang, J.C.H.,Thong, J.T.L. (1995). Charging control using pulsed scanning electron microscopy. Scanning 17 (5) : 312-315. ScholarBank@NUS Repository.
dc.identifier.issn01610457
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/72519
dc.description.abstractThis paper describes a novel method to observe highly charging specimens at high beam voltages without specimen preparation. It is found that the technique greatly reduces charging artifacts such as image shift, astigmatism, and defocussing without sacrificing image quality. Images obtained of uncoated specimens are found to be comparable to gold coated specimens and without exhibiting charging effects. The technique also allows the study of charge distribution effects in specimen charging of which very little understanding exists, particularly as far as the spatial and time- dependent properties of charging are concerned.
dc.sourceScopus
dc.subjectbeam pulsing
dc.subjectcharging control
dc.subjecthigh-voltage SEM
dc.subjectimage processing
dc.typeConference Paper
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleScanning
dc.description.volume17
dc.description.issue5
dc.description.page312-315
dc.description.codenSCNND
dc.identifier.isiutNOT_IN_WOS
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