Please use this identifier to cite or link to this item:
Title: Charging control using pulsed scanning electron microscopy
Authors: Wong, W.K. 
Phang, J.C.H. 
Thong, J.T.L. 
Keywords: beam pulsing
charging control
high-voltage SEM
image processing
Issue Date: 1995
Citation: Wong, W.K.,Phang, J.C.H.,Thong, J.T.L. (1995). Charging control using pulsed scanning electron microscopy. Scanning 17 (5) : 312-315. ScholarBank@NUS Repository.
Abstract: This paper describes a novel method to observe highly charging specimens at high beam voltages without specimen preparation. It is found that the technique greatly reduces charging artifacts such as image shift, astigmatism, and defocussing without sacrificing image quality. Images obtained of uncoated specimens are found to be comparable to gold coated specimens and without exhibiting charging effects. The technique also allows the study of charge distribution effects in specimen charging of which very little understanding exists, particularly as far as the spatial and time- dependent properties of charging are concerned.
Source Title: Scanning
ISSN: 01610457
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on May 12, 2022

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.